JPS6317245Y2 - - Google Patents

Info

Publication number
JPS6317245Y2
JPS6317245Y2 JP1982064244U JP6424482U JPS6317245Y2 JP S6317245 Y2 JPS6317245 Y2 JP S6317245Y2 JP 1982064244 U JP1982064244 U JP 1982064244U JP 6424482 U JP6424482 U JP 6424482U JP S6317245 Y2 JPS6317245 Y2 JP S6317245Y2
Authority
JP
Japan
Prior art keywords
heat
outer tube
resistant
quartz
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982064244U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58166032U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6424482U priority Critical patent/JPS58166032U/ja
Publication of JPS58166032U publication Critical patent/JPS58166032U/ja
Application granted granted Critical
Publication of JPS6317245Y2 publication Critical patent/JPS6317245Y2/ja
Granted legal-status Critical Current

Links

JP6424482U 1982-04-30 1982-04-30 熱処理治具 Granted JPS58166032U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6424482U JPS58166032U (ja) 1982-04-30 1982-04-30 熱処理治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6424482U JPS58166032U (ja) 1982-04-30 1982-04-30 熱処理治具

Publications (2)

Publication Number Publication Date
JPS58166032U JPS58166032U (ja) 1983-11-05
JPS6317245Y2 true JPS6317245Y2 (en]) 1988-05-16

Family

ID=30074285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6424482U Granted JPS58166032U (ja) 1982-04-30 1982-04-30 熱処理治具

Country Status (1)

Country Link
JP (1) JPS58166032U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5749383Y2 (en]) * 1977-09-29 1982-10-29
JPS5699851U (en]) * 1979-12-27 1981-08-06

Also Published As

Publication number Publication date
JPS58166032U (ja) 1983-11-05

Similar Documents

Publication Publication Date Title
JPH079036Y2 (ja) 縦型熱処理炉
TW318274B (en])
JPS6317245Y2 (en])
JPH10284429A (ja) ウェーハ支持装置
EP0164892A1 (en) Horizontal furnace apparatus
JPS633446B2 (en])
JP3507624B2 (ja) 熱処理用ボ−ト及び熱処理装置
JPS6095917A (ja) 熱処理炉
JPH0220830Y2 (en])
US6814808B1 (en) Carrier for semiconductor wafers
JP3650423B2 (ja) ウエハボート
JP3332168B2 (ja) 縦型ボート及びその製造方法
JP2015008202A (ja) 熱処理炉
JP2506408B2 (ja) ウェ―ハ熱処理用治具
JPS59154017A (ja) 半導体ウエハの加熱炉用パドル
JPS633155Y2 (en])
JPH01321638A (ja) 熱処理管
JPH0219959Y2 (en])
JPH11243064A (ja) ウェーハ支持板
JPH06283457A (ja) 拡散炉用低熱容量型フォーク
JPH0254924A (ja) 半導体ウエーハ積載治具
JPH0282522A (ja) 縦型熱処理装置
JPH01734A (ja) ウエーハ搬送用治具
JPH1140659A (ja) 半導体ウエハの熱処理用縦型ボート
JP2640691B2 (ja) 半導体ウェーハ搬送用治具